25 results
Texture size control by mixing glass microparticles with alkaline solution for crystalline silicon solar cells
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- Journal:
- Journal of Materials Research / Volume 33 / Issue 11 / 13 June 2018
- Published online by Cambridge University Press:
- 12 June 2018, pp. 1515-1522
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- 13 June 2018
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Low-temperature Phosphorus Doping To Silicon Using Phosphorus-related Radicals
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1391 / 2012
- Published online by Cambridge University Press:
- 20 March 2012, mrsf11-1391-j07-01
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- 2012
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A Novel Method for Low-Resistivity Metal-Interconnection by Using Metallic Functional Liquids and Catalytically Generated Hydrogen Atoms
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1401 / 2012
- Published online by Cambridge University Press:
- 17 May 2012, mrsf11-1401-t05-30
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- 2012
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Properties of High Quality p-Type Micro-Crystalline-Si Prepared by Cat-CVD
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- Journal:
- MRS Online Proceedings Library Archive / Volume 762 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, A13.2
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- 2003
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Recent Progress in Industrial Applications of CAT-CVD (Hot-Wire Cvd)
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- Journal:
- MRS Online Proceedings Library Archive / Volume 715 / 2002
- Published online by Cambridge University Press:
- 01 February 2011, A17.4
- Print publication:
- 2002
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Properties of Large Grain-Size poly-Si Films by Catalytic Chemical Sputtering
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- Journal:
- MRS Online Proceedings Library Archive / Volume 664 / 2001
- Published online by Cambridge University Press:
- 17 March 2011, A4.5
- Print publication:
- 2001
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Electrical and Structural Properties of Catalytic-Nitrided SiO2 Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 670 / 2001
- Published online by Cambridge University Press:
- 21 March 2011, K7.8
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- 2001
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Drastic Revolution in Catalytic Cvd using “Catalytic Plate” Instead of “Hot Wire”
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- Journal:
- MRS Online Proceedings Library Archive / Volume 609 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, A6.3
- Print publication:
- 2000
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Gas-Phase and Surface Reactions of Decomposed Species In Catalytic Cvd
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- Journal:
- MRS Online Proceedings Library Archive / Volume 609 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, A19.1
- Print publication:
- 2000
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200 °C Preparation of SiNx Passivation Films for PZT Ferroelectric Capacitors by Catalytic CVD
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- Journal:
- MRS Online Proceedings Library Archive / Volume 655 / 2000
- Published online by Cambridge University Press:
- 21 March 2011, CC2.10.1
- Print publication:
- 2000
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Low Temperature Nitridatio of SiO2 Films using a Catalytic-CVD System
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- Journal:
- MRS Online Proceedings Library Archive / Volume 611 / 2000
- Published online by Cambridge University Press:
- 14 March 2011, C4.5.1
- Print publication:
- 2000
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CAT-CVD Process and its Application to Preparation of Si-Based Thin Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 557 / 1999
- Published online by Cambridge University Press:
- 15 February 2011, 67
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- 1999
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Ultra-Thin High Quality Silicon Nitride Gate Dielectrics Prepared by Catalytic Chemical Vapor Deposition at Low Temperatures
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- Journal:
- MRS Online Proceedings Library Archive / Volume 567 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 155
- Print publication:
- 1999
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Low-Temperature Direct-Oxidation of Si Using Activated Oxygen Generated by Tungsten Catalytic Reaction
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- Journal:
- MRS Online Proceedings Library Archive / Volume 592 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 207
- Print publication:
- 1999
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Preparation of High-Quality Ultra-Thin Gate Dielectrics by Cat-CVD and Catalytic Anneal
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- Journal:
- MRS Online Proceedings Library Archive / Volume 606 / 1999
- Published online by Cambridge University Press:
- 15 February 2011, 121
- Print publication:
- 1999
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The Novel Technique of Nanometer-Size Fabrication by Using Conventional Photolithography
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- Journal:
- MRS Online Proceedings Library Archive / Volume 584 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 313
- Print publication:
- 1999
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Effects of Active Ammonia Gas Cracked in Catalytic-CVD on PZT Ferroelectric Capacitors
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- Journal:
- MRS Online Proceedings Library Archive / Volume 596 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 271
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- 1999
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Guide for Low-Temperature and High-Rate Deposition of Device Quality Poly-Silicon Films By Cat-Cvd Method
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- Journal:
- MRS Online Proceedings Library Archive / Volume 507 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 435
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- 1998
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Properties of CAT-CVD Silicon Nitride Films and Their Application as Passivation Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 446 / 1996
- Published online by Cambridge University Press:
- 10 February 2011, 109
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- 1996
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Low-Temperature Formation of Device-Quality Polysilicon Films by cat-CVD Method
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- Journal:
- MRS Online Proceedings Library Archive / Volume 452 / 1996
- Published online by Cambridge University Press:
- 15 February 2011, 983
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- 1996
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